SELPA
Description
SELPA(Scanning ELectron Microscope for Particle Analysis) is an automated large area particle analyzer, which is developed based on SEM(Scanning Electron Microscope)
In industrial application, it can be used to analyze and classify the particles by their various size and element, the strength of SELPA is that the large area mapping is possible. Also, SELPA can analyze particles under 2.5um, it's a SEM/EDS automated system which can get the results of elements distribution of selected area.
Applications
- Cleanliness Test
- Steel Inclusion Test
- GSR (Gun Shot Residue) Analysis
- Mineral, Asbestos Analysis
- Particle Analysis
Electron Gun | Pre-centered Cartridge |
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Source | Tungsten (W) |
Magnification | x60 to x5,000 |
Acceleration Voltage | 1 to 30kV (1kV increment) |
Vacuum Mode | Variable Pressure (10Pa, 20Pa, 40Pa, 60Pa) |
Detector | BSED(DP) |
Stage | X: 100mm (Motorized) Y: 100mm (Motorized) Z: 12 to 40mm (Motorized) |
Chamber Size | 220mm in diameter |
Maximum Sample Size | 100mm in diameter |
Maximum Sample Height | 28mm |
GUI | NanoStation 4.1 |
Auto Image Adjustment | Auto Focus (New algorism) Real Time Auto B/C (Normalized algorism) One click Auto B/C |
Vacuum System | Turbo Pump Rotary Pump MFC (VP control) |
Special Feature | Chamber View Camera Quadriad Membrane Filter Specimen Stage Multiple Pin Stub Specimen Stage |
EDS | Oxford / Bruker |
EDS Option | Clean / Steel / GSR / Mineral |
Optional Products